FinFET Process Integration (Semiconductor Academy 7)

Partner: Udemy
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Description: This course provides a comprehensive overview of FinFET process flow and strained Si technique. You'll learn critical process concepts and purpose of each process step, equipping you with the state-of-the-art knowledge and skills to enter the semiconductor foundries.What you will learn in this class ?   (1)  What is FinFET & Why we need FinFET?(2)  FinFET Process OverviewFront end of line (FEOL): Transistor formation Middle end of line (MEOL): Contact formation Back end of line (BEOL): Interconnect formation(3)  Front End of Line (FEOL): Transistor Formation, including the following steps, Fin formationSTI (Shallow Trench Isolation) engineeringWell engineeringGate engineeringLDD (Lightly Doped Drain)/ Spacer/ S&D Epitaxy/ Silicide/ ILD (Inter Layer Dielectric) engineering(4)  HKMG (High-K Metal Gate) techniqueWhat is HKMG and its advantageComparison between HKMG and Poly Gate(5) Introduction to HCI (Hot Carrier Injection) effect(6) Introduction to Strained Silicon techniqueMaterial Science: SiGe & SiP epitaxy(7) Middle End of Line (MEOL): Contact Formation, including the following steps, MP/MD formation(8)  Back End of Line (BEOL): Interconnect Formation, including the following steps, Metal layer engineeringIMD (Inter Metal Dielectric) / Via engineering Passivation/ AP engineering Dual Damascene process(9)  Ending & Forecast:An overview from past courses to future courses
Category: Teaching & Academics > Engineering > Electrical Engineering
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Price: 19.99
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Source: Impact
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